Kính hiển vi điện tử quét phát xạ trường điện tử (FE-SEM) - JSM-7610F/JEOL

High resolution imaging and high performance analysis by semi-in-lens objective lens
 - The JSM-7610F combines two proven technologies – an electron column with semi-in-lens objective lens which can provide high resolution imaging by low accelerating voltage and an in-lens Schottky FEG which can provide stable large probe current – to deliver ultrahigh resolution with wide range of probe currents for all applications (A few pA to more than 200 nA).
 - The in-lens Schottky FEG is a combination of a Schottky FEG and the first condenser lens and is designed to collect the electrons from the emitter efficiently.
The topmost surface imaging at low accelerating voltage by Gentle Beam mode (GB)
 - The High Power Optics produces fine electron probe for both observation and analysis.
 - The aperture angle control lens maintains a small probe diameter even at a larger probe current.
 - Using both techniques, the 7610F is suitable for a wide variety of analysis with EDS, WDS, CL etc