Park XE7 Specifications
XY Scanner
Single-module flexure XY scanner with closed-loop control
Scan range : 100μm x 100μm
50μm x 50μm
10μm x 10μm
Manual Stage
XY travel range : 13 × 13 mm
Z travel range : 29.5 mm
Focus travel range : 70 mm
Z Scanner range
Guided high-force Z scanner
Scan range : 12 µm
15 µm
Sample Mount
Sample size : Up to 100 mm
Thickness : Up to 20 mm
Vision
Direct on-axis vision of sample surface and cantilever
Coupled with 10× objective lens (20× optional)
Field-of-view : 480 × 360 µm
CCD : 1 Mpixel
Software
XEP
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)
XEI
AFM data analysis software
Electronics
High performance DSP : 600 MHz with 4800 MIPS
Maximum 16 data images
Maximum data size : 4096 × 4096 pixels
Signal inputs : 20 channels of 16 bit ADC at 500 kHz samplings
Signal outputs : 21 channels of 16 bit DAC at 500 kHz settling
Synchronous signal : End-of-image, end-of-line, and end-of-pixel TTL signals
Active Q control (optional)
Cantilever spring constant calibration (optional)
CE Compliant
Power : 120 W
Signal Access Module (Optional)