Kính hiển vi lực nguyên tử (AFM) - NX10/PARK SYSTEMS

Z Scanner:

   + Guided high-force flexure scanner
   + Scan range : 15 µm (optional 30 µm)
   + Resolution : 0.015 nm
   + Position detector noise : 0.03 nm (bandwidth: 1 kHz)
   + Resonant frequency : > 9 kHz (typically 10.5 kHz)

XY Scanner

   + Single module flexure XY-scanner with closed-loop control
   + 50 µm × 50 µm (optional 10 µm × 10 µm or 100 µm × 100 µm)
   + Resolution : 0.05 nm
   + Position detector noise : < 0.25 nm (bandwidth: 1 kHz)
   + Out-of-plane motion : < 2 nm (over 40 µm scan)

Stage

   + Z stage range : 25 mm
   + Focus travel range : 15 mm
   + XY stage travel range : 20 mm x 20 mm
   + Sample size : Open space up to 100 mm x 100 mm, thickness up to 20 mm
   + Sample weight : < 500 g

Vision

   + 10x (0.21NA) ultra-long working distance lens (1µm resolution)
   + 20x (0.42 NA) high-resolution, long working distance lens (0.6 µm resolution)
   + Direct on-axis vision of sample surface and cantilever
   + Field-of-view : 480 × 360 µm (with 10× objective lens)
   + CCD : 1 Mpixel, 5 Mpixel (optional)